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Vlsi Technology Design & Basics Of Microelectronics
by Rk Singh (Author),
Sk Kataria & Sons (Publisher)
Product Specifications
Book Description
Table of Contents
* Introduction to VLSI Technology
* Film Deposition
* Epitaxy Process
* Diffusion Process
* Ion Implantation
* Lithography
* Photoresist and Etching
* MOSFET and MOS Fabrication Technology
* Simulation Process (IC Fabrication Steps)
* Bipolar IC Technology
* Appendices
* Examination Paper
* Index
Book Specifications
ISBN-13 9788188458172
Language English
Binding Paper Back
Publisher Sk Kataria & Sons
Publishing Date 2015
Product Edition 1