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Product Specifications
Book Summary
Covering the technologies developed to produce flat surfaces with nanometer
accuracy for the subsequent building of semiconductor devices and integrated
circuits, this title offers engineers detailed guidance in the entire substrate
surface preparation process, from lapping and polishing... to specialized
techniques and surface finishing.
Covering the technologies developed to produce flat surfaces with nanometer
accuracy for the subsequent building of semiconductor devices and integrated
circuits, this title offers engineers detailed guidance in the entire substrate
surface preparation process, from lapping and polishing... to specialized
techniques and surface finishing.