Substrate Surface Preparation
Substrate Surface Preparation
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Book Summary
Covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits, this title offers engineers detailed guidance in the entire substrate surface preparation process, from lapping and polishing... to specialized techniques and surface finishing.
ISBN-13
9781608072132
Language
English
Binding
Hard Bound
Publisher
Artech House, Incorporated
Publishing Date
2011-11-30
Product Edition
1
Total Pages
200

Substrate Surface Preparation

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Product Specifications
Book Summary
Covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits, this title offers engineers detailed guidance in the entire substrate surface preparation process, from lapping and polishing... to specialized techniques and surface finishing.
Book Specifications
ISBN-13
9781608072132
Language
English
Binding
Hard Bound
Publisher
Artech House, Incorporated
Publishing Date
2011-11-30
Product Edition
1
Total Pages
200