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Nanoscale Calibration Standards And Methods: Dimensional And Related Measurements In The Micro- And Nanometer Range
by Ludger Koenders, Gunter Wilkening (Author),
Wiley-VCH (Publisher)
Product Specifications
Book Description
The quantitative determination of the properties of micro- and nanostructures is
essential in research and development. It is also a prerequisite in process
control and quality assurance in industry. The knowledge of the geometrical
dimensions of structures in most cases is the base, to which other physical and
chemical properties are linked. Quantitative measurements require reliable and
stable instruments, suitable measurement procedures as well as appropriate
calibration artefacts and methods. The seminar "NanoScale 2004" (6th Seminar on
Quantitative Microscopy and 2nd Seminar on Nanoscale Calibration Standards and
Methods) at the National Metrology Institute (Physikalisch-Technische
Bundesanstalt PTB), Braunschweig, Germany, continues the series of seminars on
Quantitative Microscopy. The series stimulates
Book Specifications
ISBN-13 9783527405022
Language English
Binding Hard Bound
Publisher Wiley-VCH
Publishing Date 2005-07-01